Cleaning Technology

About us

The group of cleaning technology was established in 1990. We have been dealing with versatile problems related to contamination control in manufacturing processes of semiconductors, LCD, and pharmaceutical products. We will expand the targets of contamination control into the fields of precision machines and foods as well as cleaning technologies for home appliances.

Present status and Prospect in Clean Technology

  1. Control technology and measurement methods for submicron particles (Improvement of filter efficiency, sealing of HEPA/ULPA filter, and containment of emission source)
  2. Survey on the necessity of HEPA filters for indoor ventilation to remove PM 2.5 particles
  3. Control of clean room environment (control of air flow distribution, simulation technology and design of ceiling-less clean room)
  4. On-line and off-line measurement of sub-micron particles and chemical species
  5. Construction of mini-environment and clean system (300 mm wafer, FOUP, cleaning of local area and prevention of electrostatics )
  6. Microbial contamination control technology (cGMP, PIC/S, HACCP and in situ measurement of microbiology)
  7. Risk management for the pioneering industries in clean technology
  8. Establishment of simple and economical measurement technology of nanoparticles in the minienvironment dealing with 300 mm wafer and FOUP in semiconductor industries
  9. Clean technology of large size flat panel displays and organic electroluminescence including the prevention of electrostatics
  10. Development of environmentally friendly technologies for energy saving and reduction of CO2
  11. Clean technology for quality control and safety for GMP validation and HACCP in the pharmaceutical and food industries
  12. Clean equipment, sterilization and hazard management for processes of manufacturing biologically active agents and culture process in regenerative medicine
  13. Revision and development of ISO documents in ISO/TC209 and TC142 for clean room and air filters

Conductor

Coordinator Kanazawa University,
Graduate School of Natural Science and Technology,
Department of Chemical Engineering
OTANI/Yoshio
Vice Coordinator Tokyo Institute of Technology KAGI/Naoki
Representative Organizer Chiyoda TechnoAce Co.,Ltd UJI/Katsuyuki
Vice Representative Organizer RION CO., LTD. MATSUDA/Tomonobu
TOYOBO CO., LTD.  HAYASHI/Toshiaki
Organizer HITACHI, LTD. KAMITANI/Matsuo
HOSOKAWA MICRON CORPORATION SANO/Atsushi
JAPAN AIR FILTER CO., LTD.  KATOU/Takayuki
TOKYO DYLEC CORP. INOUE/Takahiro
Emeritus Organizer Hitachi Plant Services Co., Ltd. WATANABE/Koji